Reliability of MEMS
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Beschreibung
This first book to cover exclusively and in detail the principles, tools and methods for determining the reliability of microelectromechanical materials, components and devices covers both component materials as well as entire MEMS devices. Divided into two major parts, following a general introductory chapter to reliability issues, the first part looks at the mechanical properties of the materials used in MEMS, explaining in detail the necessary measuring technologies -- nanoindenters, bulge methods, bending tests, tensile tests, and others. Part Two treats the actual devices, organized by important device categories such as pressure sensors, inertial sensors, RF MEMS, and optical MEMS.
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Über den Autor
Osamu Tabata received his Ph.D. degree from Nagoya Institute of Technology, Japan, in 1993. From 1981 to 1996, he performed industrial research at Toyota Central Research and Development Laboratories in Aichi, Japan. He then joined the Department of Mecha
- Hardcover
- 496 Seiten
- John Wiley & Sons Inc
- Hardcover
- 332 Seiten
- Erschienen 2008
- De Gruyter Oldenbourg