Handbook of 3D Integration: Volume 3: 3D Process Technology
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Beschreibung
Das Buch "Handbook of 3D Integration: Volume 3: 3D Process Technology" von Peter Ramm bietet eine umfassende Übersicht über die Technologien und Verfahren, die in der dreidimensionalen Integration von Halbleitern verwendet werden. Es behandelt fortschrittliche Prozesse zur Herstellung und Verbindung von 3D-Strukturen, einschließlich Through-Silicon Vias (TSVs), Wafer-Bonding-Techniken und Stapeltechnologien. Der Band richtet sich an Ingenieure, Forscher und Fachleute aus der Mikroelektronikbranche und bietet detaillierte technische Informationen sowie aktuelle Entwicklungen in der 3D-Integrationstechnologie. Ziel ist es, das Verständnis für die Herausforderungen und Möglichkeiten dieser innovativen Technologie zu vertiefen und deren Anwendungspotenzial aufzuzeigen.
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Über den Autor
Philip Garrou is a consultant and expert witness in the field of IC packaging materials and applications, prior to which he was Dir. of Technology and Business Dev. for Dow Chemicals' Electronic Materials business. Dr. Garrou is a Fellow of IEEE and IMAPS and served as President of the IEEE CPMT Society and IMAPS. He has co-authored 3 microelectronics texts and 100+ publications. He is Assoc. Ed. and author of the weekly blog "Insights from the Leading Edge" for Solid State Technology and has co-authored 3DIC reports for both TechSearch and Yole. Mitsumasa Koyanagi is Professor in New Industry Creation Hatchery Center (NICHe) and Director in GINTI (Global Integration Initiative) at Tohoku University, Japan. After his PhD in electrical engineering he joined the Central Research Laboratory of Hitachi where he was engaged in the research on semiconductor memories. After a three-year stay at the Xerox Palo Alto Research Center in California, USA, he became Professor in the Research Center for Integrated Systems at Hiroshima University, Japan. Mitsumasa Koyanagi received numerous awards, including the IEEE Jun-ichi Nishizawa Medal and the National Medal with Purple Ribbon in Japan. Peter Ramm is head of the department Heterogeneous System Integration of Fraunhofer EMFT in Munich, Germany, where he is responsible for the key competence "Si Processes, Device and 3D Integration". He received the physics and Dr. rer. nat. degrees from the University of Regensburg and subsequently worked for Siemens in the DRAM facility where he was responsible for the process integration. In 1988 he joined Fraunhofer IFT in Munich, focusing for more than 25 years on 3D integration technologies. Peter Ramm is coauthor of over 100 publications and 24 patents and editor of Wiley¿s "Handbook of Wafer Bonding". He received the "Ashman Award 2009" from IMAPS "For Pioneering Work on 3D IC Stacking and Integration".
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