LIGA and its Applications (Advanced Micro and Nanosystems, 7, Band 7)
Diese Beschreibung wurde mittels künstlicher Intelligenz generiert
"LIGA and its Applications" von Osamu Tabata ist ein umfassendes Werk, das sich mit der LIGA-Technologie und ihren vielfältigen Anwendungen in der Mikro- und Nanotechnologie befasst. LIGA steht für Lithographie, Galvanoformung und Abformung, ein Prozess, der es ermöglicht, hochpräzise mikromechanische Bauteile herzustellen. Das Buch bietet eine detaillierte Einführung in die Grundlagen der LIGA-Technik und beschreibt die verschiedenen Schritte des Herstellungsprozesses.
Es werden sowohl theoretische als auch praktische Aspekte behandelt, einschließlich der verwendeten Materialien, der technologischen Herausforderungen und der Optimierungsmöglichkeiten. Darüber hinaus beleuchtet das Buch eine Vielzahl von Anwendungen dieser Technologie in Bereichen wie Medizintechnik, Elektronik und Optik. Durch Fallstudien und Beispiele aus der Industrie wird verdeutlicht, wie LIGA zur Entwicklung innovativer Produkte beiträgt. Insgesamt dient das Werk als wertvolle Ressource für Ingenieure, Forscher und Studierende im Bereich Mikrosystemtechnik.
Volker Saile is the director of the Institute for Microstructure Technology (IMT) at Karlsruhe Technical University, Germany. ((...))Ulrike Wallrabe is Professor for Microactuators at IMTEK Freiburg, Germany, since 2003. She studied physics at the University of Karlsruhe and went on to obtain her Ph.D. on microturbines and micromotors at the Institute for Microstructure Technology at the Research Centre in Karlsruhe (FZK) in 1992. At IMT, she subsequently dealt with microactuators and their application in medical technology. From 1999 on, she turned to microoptics and developed components for optical metrology, telecommunications and for optical sensors such as fibre connectors, optical switches, distance sensors and spectrometers, generally produced with the LIGA method.Her research interests include exploration of new actuator materials, actuator fabrication techniques, and combining microactuators and microoptics.Osamu Tabata is Professor at the Department of Mechanical Engineering at Kyoto University, Japan. He performed industrial research at Toyota Central Research and Development Laboratories in Aichi from 1981 to 1996. He then joined the Department of Mechanical Engineering of Ritsumeikan University in Shiga, Japan, and spent Guest Professorships at IMTEK Freiburg, Germany, and at ETH Zurich, Switzerland. In 2003, Japan. He is currently engaged in the research of micro/nano processes, the LIGA process, MEMS and micro/nano system synthetic engineering (SENS). He was honored with the Science News Award in 1987, Presentation Paper Award in 1992, and received the R&D 100 Award in 1993 and 1998.Jan G. Korvink holds a Chair for Microsystem Technology at Albert Ludwig University in Freiburg, Germany, where he runs the laboratory for microsystem simulation. Prior to that, he worked at the Physical Electronics Lab of the ETH Zurich, where he built up and led the microsystem modeling effort. MEMS simulation programs that were developed by him and his group were successfully commercialized. He has co-authored more than 100 papers in scientific journals and conference digests, as well as numerous book chapters and a book on semiconductors for engineers.His research interests cover the modeling and simulation of microsystems and the low-cost fabrication of polymer-based MEMS.
bestellen
Handgeprüfte Gebrauchtware
Schnelle Lieferung
Faire Preise
